Title:
電気機械変換装置及びその作製方法
Document Type and Number:
Japanese Patent JP5921079
Kind Code:
B2
Abstract:
An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
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Inventors:
Toshio Tomiyoshi
Kazutoshi Torashima
Takahiro Akiyama
Kazutoshi Torashima
Takahiro Akiyama
Application Number:
JP2011084673A
Publication Date:
May 24, 2016
Filing Date:
April 06, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R19/00; B81B3/00; H04R31/00
Domestic Patent References:
| JP2007259165A | ||||
| JP2010154734A | ||||
| JP2007527285A | ||||
| JP2010272956A | ||||
| JP2009086469A | ||||
| JP11014484A | ||||
| JP2007528153A |
Foreign References:
| US20070222338 | ||||
| US20100123366 | ||||
| US20050200241 | ||||
| US20120058587 | ||||
| US20050177045 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa