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Title:
Electromechanical converter and its manufacturing method
Document Type and Number:
Japanese Patent JP6309034
Kind Code:
B2
Inventors:
Kazutoshi Torashima
Takahiro Akiyama
Toshio Tomiyoshi
Application Number:
JP2016007422A
Publication Date:
April 11, 2018
Filing Date:
January 18, 2016
Export Citation:
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Assignee:
Canon Inc
International Classes:
H04R19/00; B81B3/00; B81C1/00; H01L29/84; H04R31/00
Domestic Patent References:
JP2009055473A
JP2011004280A
JP2007259165A
JP2006211185A
Foreign References:
WO2010032156A1
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa



 
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