Title:
蒸気ジェット真空ポンプにおける電力制御方法および装置
Document Type and Number:
Japanese Patent JP2005524024
Kind Code:
A
Abstract:
Methods and apparatus for controlling power supplied to vapor jet vacuum pumps are provided. A vapor jet vacuum pumping system includes a vapor jet pump having an inlet port, an exhaust port, a jet assembly and an boiler, the boiler including a heater, and a power controller for automatically controlling power supplied to the heater in response to at least one control parameter. The power may be controlled in response to a programmed sequence, to a sensed pressure in a process chamber, to control signals from a process control system, or to combinations of these control parameters.
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Inventors:
Habranian, Mars Bed
Application Number:
JP2004501803A
Publication Date:
August 11, 2005
Filing Date:
April 04, 2003
Export Citation:
Assignee:
Varian, Incorporated
International Classes:
F04F5/48; F04F9/08; (IPC1-7): F04F5/48
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki