Title:
An electric power unit and an impedance matching method
Document Type and Number:
Japanese Patent JP6244014
Kind Code:
B2
Abstract:
This power supply device for outputting high-frequency power to an external load is configured so as to be provided with: a matching unit having a variable matching element for changing the output impedance of the power supply device; a detector for detecting the size of reflection waves included in the high-frequency power, or the output current value outputted to the load or the input impedance of the matching unit; a storage unit for storing a matching map including a plurality of first and second parameter values for changing the size of the reflection waves, or the input impedance or the output current value, the matching map having a plurality of setting points determined by a combination of the first and second parameter values; and a control unit for performing a matching process in which the output impedance of the power supply device is changed by changing the first and second parameter values so that a shift is made from one of the setting points to a matching point at which the size of the reflection waves, or the input impedance or the output current value is equal to or less than a first value, and performing control so that adjacent setting points are passed through when the matching process is performed.
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Inventors:
▲高▼橋 直人
Naoya Fujimoto
Noriichi Kato
Naoya Fujimoto
Noriichi Kato
Application Number:
JP2016511190A
Publication Date:
December 06, 2017
Filing Date:
March 31, 2014
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H05H1/46; H03H7/40
Domestic Patent References:
| JP2006166412A | ||||
| JP2007266374A | ||||
| JP7153599A | ||||
| JP2009188352A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation