An electromagnetism actuator, a base material, and a lithography device

Title:

An electromagnetism actuator, a base material, and a lithography device

Document Type and Number:

Japanese Patent JP6023334

Kind Code:

B2

Abstract:

An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.

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Inventors:

Cox, Henrykas, Hermann, Marie
Helen, Mark, Marcus, Geralds
Highmans, peter, michel, sylvester, maria
Felten, Jacob Jan
Van De Rift, Johannes, Hubertus, Antonius
Gielen, Godfreyde, Catalina, Hubertus, Franciscus
Keshroud, Abdelhamid

Application Number:

JP2015527860A

Publication Date:

November 09, 2016

Filing Date:

August 15, 2013

Export Citation:

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