Title:
ELECTRON BEAM APPARATUS AND X-RAY GUN
Document Type and Number:
Japanese Patent JP2017041446
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an X-ray source which can operate at energies of up to 500 kV or beyond and is suitable for use in commercial and research applications such as computerized tomography.SOLUTION: A high-voltage generator includes a shield electrode electrically connected intermediate between a first voltage multiplier and a second voltage multiplier. An electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. A rotary vacuum seal includes a pumpable chamber at a position intermediate between high-vacuum and low-vacuum ends of a bore for a rotating shaft. A rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. A rotary X-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region around an axis of rotation of the hub.SELECTED DRAWING: Figure 2
Inventors:
ROGER HADLAND
Application Number:
JP2016161100A
Publication Date:
February 23, 2017
Filing Date:
August 19, 2016
Export Citation:
Assignee:
NIKON METROLOGY NV
International Classes:
H01J35/00; G01N23/04; H01J35/18; H05G1/20
Domestic Patent References:
| JPS5725660A | 1982-02-10 | |||
| JP2005166370A | 2005-06-23 |
Foreign References:
| US20030147498A1 | 2003-08-07 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe
Shinya Mitsuhiro
Tatsuhiko Abe