Title:
電子デバイス、テスト方法および製造方法
Document Type and Number:
Japanese Patent JP2005514761
Kind Code:
A
Abstract:
The electronic device ( 10 ) comprises a capacitor ( 12 ) and an inductor ( 11 ) and is present on a substrate ( 1 ) with an unplanarized surface ( 2 ). This is realized in winding ( 21 ) of the inductor ( 11 ) has a thickness of at least 1 micron and has a planarized upper surface ( 81 ). The upper electrode ( 32 ) of the capacitor is present in a second electrode layer ( 6 ) and has a lower surface ( 82 ) which is spaced from the substrate ( 1 ) by a larger distance than the upper surface ( 81 ) of the lower electrode ( 31 ). The second electrode layer ( 6 ) preferably includes a second winding ( 22 ) of the inductor ( 11 ). The electronic device ( 10 ) is suitable for use at high frequencies.
Inventors:
Fan beak joseph tm
Leaks Theodor GSM
Matters Camera Marion K
Fan Esch Henrix A
Leaks Theodor GSM
Matters Camera Marion K
Fan Esch Henrix A
Application Number:
JP2003522266A
Publication Date:
May 19, 2005
Filing Date:
August 14, 2002
Export Citation:
Assignee:
Koninklijke Philips Electronics N.V.
International Classes:
H01F41/00; G01R27/26; H01F17/00; H01F27/00; H01G4/40; H01L21/02; H01L23/64; H01L27/08; H03H5/02; H03H7/01; H03H7/42; H03H9/24; H01F27/28; (IPC1-7): H01F27/00; H01F41/00; H01G4/40; H03H5/02; H03H7/42; H03H9/24
Attorney, Agent or Firm:
Masao Sawada