Title:
電子デバイスとその製造方法
Document Type and Number:
Japanese Patent JPWO2012131911
Kind Code:
A
Inventors:
Toyota 治
Application Number:
JP2011057848W
Publication Date:
July 24, 2014
Filing Date:
March 29, 2011
Export Citation:
Assignee:
富士通株式会社
International Classes:
B81C1/00; B81B3/00; H01G5/011; H01G5/16; H01L41/09
Attorney, Agent or Firm:
Keizo Okamoto