Title:
【発明の名称】電子マイクロ弁装置及びその製造方法
Document Type and Number:
Japanese Patent JP3041538
Kind Code:
B2
Abstract:
In an electronic microvalve it is desired to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with an inlet (2) and outlet (6) on opposite sides of the silicon wafer (1) (Fig. 1a).
Inventors:
Wurich Bourne
Thomas Earl Stain
Thomas Earl Stain
Application Number:
JP33700790A
Publication Date:
May 15, 2000
Filing Date:
November 30, 1990
Export Citation:
Assignee:
Honeywell Incorporated
International Classes:
F15C5/00; F16K99/00; F16K31/02; (IPC1-7): F16K31/02
Domestic Patent References:
| JP63307959A | ||||
| JP60208676A | ||||
| JP61183970A |
Attorney, Agent or Firm:
Masaki Yamakawa (3 outside)