Title:
電子顕微鏡
Document Type and Number:
Japanese Patent JP4048925
Kind Code:
B2
Abstract:
An electron microscope is provided, which enables an observation with high resolution. The electron microscope is able to detect the deviation of an electron beam relative to the opening of a slit quantitatively, thereby shifting the electron beam accurately to the center of the opening of slit so as to execute energy selection. The electron microscope has an energy filter control unit for adjusting a relative position between an electron beam and a slit by shifting the position of electron beam based on a signal delivered by an energy filter electron beam detector. Also a method for controlling an energy filter is provided, which includes the steps of shifting the position of an electron beam, determining the position of electron beam and letting the electron beam pass through the center of an opening of the slit by controlling the position of slit or position of electron beam.
Inventors:
Blacksmith
Shohei Terada
Tadashi Otaka
Shohei Terada
Tadashi Otaka
Application Number:
JP2002333020A
Publication Date:
February 20, 2008
Filing Date:
November 18, 2002
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/26; H01J37/05; H01J37/28
Domestic Patent References:
| JP58032347A | ||||
| JP2001357809A | ||||
| JP55144577A |
Foreign References:
| WO1998006125A1 | ||||
| WO2001082330A1 |
Attorney, Agent or Firm:
Manabu Inoue