Title:
電子顕微鏡
Document Type and Number:
Japanese Patent JP7144266
Kind Code:
B2
Abstract:
To provide an electron microscope including an X-ray detector mounted thereon, the electron microscope being high in detection efficiency of X-rays.SOLUTION: An electron microscope 100 includes: a sample holder 13 which holds a sample S; an EDS detector 18 which detects an X-ray generated by irradiating a sample S with an electron beam; an EDS detector drive unit 19 which moves the EDS detector 18; and an EDS controller 32 as a control unit to control the EDS detector drive unit 19. The control unit controls the EDS detector drive unit 19 such that the EDS detector 18 moves depending on the position of the sample holder 13.SELECTED DRAWING: Figure 1
Inventors:
Takeo Sasaki
Yorinobu Iwasawa
Masaki Morita
Koji Miyatake
Ichiro Ohnishi
Yorinobu Iwasawa
Masaki Morita
Koji Miyatake
Ichiro Ohnishi
Application Number:
JP2018187215A
Publication Date:
September 29, 2022
Filing Date:
October 02, 2018
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/244; H01J37/20; H01J37/22
Domestic Patent References:
| JP63281341A | ||||
| JP2002221504A | ||||
| JP2016024900A |
Attorney, Agent or Firm:
Fuse Yukio
Michie Obuchi
Michie Obuchi
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