Title:
An electrostatic capacity sensor and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6047279
Kind Code:
B2
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Inventors:
Yusuke Kobayashi
Application Number:
JP2011225869A
Publication Date:
December 21, 2016
Filing Date:
October 13, 2011
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01H36/00; H01H11/00
Domestic Patent References:
| JP2010267607A | ||||
| JP59175785A | ||||
| JP3297192A | ||||
| JP2010244776A | ||||
| JP2007101489A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Kazuya Nishi
Tadashi Takahashi
Suzuki Mitsuyoshi
Kazuya Nishi