Title:
イオンビームの流れに乗った粒子の静電捕捉システム
Document Type and Number:
Japanese Patent JP5333708
Kind Code:
B2
Abstract:
A system for inhibiting the transport of contaminant particles with an ion beam includes a pair of electrodes that provide opposite electric fields through which the ion beam travels. A particle entrained in the ion beam is charged to a polarity matching the polarity of ion beam when traveling through a first of the electric fields. The downstream electrode provides another electric field for repelling the positively charged particle away from the direction of beam travel.
Inventors:
Eric Ryan Harrington
Victor Maurice Ben Benister
Michael anthony graph
Robert dei rasmel
Victor Maurice Ben Benister
Michael anthony graph
Robert dei rasmel
Application Number:
JP2002524185A
Publication Date:
November 06, 2013
Filing Date:
August 21, 2001
Export Citation:
Assignee:
Axcelis Technologies, Inc.
International Classes:
H01J37/317; H01J3/40; H01J37/02; H01J37/30; H01L21/265
Domestic Patent References:
| JP5234564A | ||||
| JP10512393A | ||||
| JP6243815A | ||||
| JP1265439A |
Attorney, Agent or Firm:
Calyx
Miyazaki Yoshio
Kaoru Onozuka
Miyazaki Yoshio
Kaoru Onozuka
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