Title:
The electrostatic zipper which has an elastic projection part contact surface in which optical patternizing is possible
Document Type and Number:
Japanese Patent JP6238996
Kind Code:
B2
Abstract:
In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
Inventors:
Lynn, Ekuang
Cook, Richard A
Liptinsky, Yakubu
Cook, Richard A
Liptinsky, Yakubu
Application Number:
JP2015540730A
Publication Date:
November 29, 2017
Filing Date:
October 29, 2013
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2012527125A | ||||
| JP8330405A | ||||
| JP6223944A | ||||
| JP2000164684A | ||||
| JP2008135736A | ||||
| JP2009043995A |
Foreign References:
| WO2012033922A1 | ||||
| WO2011149918A1 | ||||
| WO2008108146A1 | ||||
| US20080064184 |
Attorney, Agent or Firm:
Kawaguchi International Patent Office
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