An electrostrictive actuator device and its manufacturing method

Title:

An electrostrictive actuator device and its manufacturing method

Document Type and Number:

Japanese Patent JP6051412

Kind Code:

B2

Abstract:

A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration layer and configured to vibrate together with the lower vibration layer. The driver includes an upper electrode layer on a lower surface of the lower vibration layer, a piezoelectric layer on a lower surface of the upper electrode layer, and a lower electrode layer on a lower surface of the piezoelectric layer. The lower vibration layer of the vibrator is made of organic material. The upper vibration layer is mainly made of inorganic material. The lower vibration layer has a smaller longitudinal elastic modulus than the upper vibration layer. The piezoelectric actuator device has a large resistance to disturbance vibrations and a large warping amount of the vibrator without increasing power consumption.

Inventors:

Soichiro Hiraoka
Kazuki Komaki
Nakazono Shinsuke
Akira Kurozuka
Toshiaki Horie

Application Number:

JP2013556260A

Publication Date:

December 27, 2016

Filing Date:

January 29, 2013

Export Citation:

Click for automatic bibliography generation Help

Assignee:

Panasonic IP Management Co., Ltd.

International Classes:

H01L41/18; B81B3/00; B81C1/00; G01C19/56; G02B26/08; G02B26/10; H01H57/00; H01L41/047; H01L41/053; H01L41/09; H01L41/113; H02N2/00; H03H3/007; H03H9/24

Domestic Patent References:

JP2012015757A
JP2009174420A
JP2010081573A
JP2010263061A
JP2006303466A
JP2010148265A
JP2011181556A
JP4835813B1
JP2009193804A
JP2001024460A
JP2009117687A

Attorney, Agent or Firm:

Kenji Kamada
Hiroo Maeda

Previous Patent: A paste feeder, a screen printer, and a paste feeding method

Next Patent: JPS6051413