Title:
圧電アクチュエータデバイスとその製造方法
Document Type and Number:
Japanese Patent JPWO2013114857
Kind Code:
A
Inventors:
Soichiro Hiraoka
Komaki Kazuki
Shinsuke Nakazono
Akira Kurozuka
Horie 寿彰
Komaki Kazuki
Shinsuke Nakazono
Akira Kurozuka
Horie 寿彰
Application Number:
JP2013000455W
Publication Date:
May 11, 2015
Filing Date:
January 29, 2013
Export Citation:
Assignee:
Panasonic IP management incorporated company
International Classes:
H01L41/18; G02B26/10; H01L41/053; H03H3/007; B81C1/00; H01L41/113; G02B26/08; H01L41/047; H01L41/09; H03H9/24; H01H57/00; H02N2/00; B81B3/00; G01C19/5607
Attorney, Agent or Firm:
Fujii Kentaro
Kenji Kamata
Hiroo Maeda
Kenji Kamata
Hiroo Maeda