Title:
【発明の名称】マイクロマシン形ボイラ内の流体を制御する装置および方法
Document Type and Number:
Japanese Patent JP2002525215
Kind Code:
A
Abstract:
A micromachined fluid control apparatus includes a micromachined boiler with a thermally conductive housing that has a housing exterior surface and a housing interior surface. The housing interior surface defines an interior void that has a fluid positioned within it. A heat source is incorporated with the housing exterior surface. The heat source selectively generates heat that is conducted through the thermally conductive housing so as to selectively expand the fluid in a predetermined manner. A load resistor may be positioned within the thermally conductive housing. Current may be driven through the load resistor in a predetermined manner to further control the selective expansion of the fluid.
Inventors:
Cossard Bradford A
Application Number:
JP2000572625A
Publication Date:
August 13, 2002
Filing Date:
September 24, 1999
Export Citation:
Assignee:
Redwood Micro Systems
International Classes:
B81B3/00; F15C5/00; F16K99/00; (IPC1-7): B81B3/00
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)