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Title:
エステル化合物とその製造方法、高分子化合物、レジスト材料、及びパターン形成方法
Document Type and Number:
Japanese Patent JP4998724
Kind Code:
B2
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Inventors:
Masaki Ohashi
Tsuyoshi Kanao
Takeshi Watanabe
Application Number:
JP2007170036A
Publication Date:
August 15, 2012
Filing Date:
June 28, 2007
Export Citation:
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Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C07D307/77; C07D307/94; C07D311/96; C08F20/28; C08F222/06; C08F232/04; G03F7/039
Domestic Patent References:
JP2005350527A
JP2005325293A
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa



 
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