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Title:
An etching solution constituent and an etching method
Document Type and Number:
Japanese Patent JP5913869
Kind Code:
B2
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Inventors:
Atsushi Matsui
Kimura Mayumi
Tahiro Tsuguhiro
Application Number:
JP2011189633A
Publication Date:
April 27, 2016
Filing Date:
August 31, 2011
Export Citation:
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Assignee:
Hayashi Pure Chemicals Co., Ltd.
International Classes:
H01L21/308; H01L21/768; H01L23/522
Domestic Patent References:
JP2008053723A
JP2006098421A
JP2000160367A
JP2000164585A
JP2004140197A
JP2004528716A
Foreign References:
WO2010039936A2
Attorney, Agent or Firm:
Patent Business Corporation Imy International Patent Office
Hidehiko Ito
Morishita Hachiro
Hiroyuki Yoshida
Katsuya Tanaka
Naoki Takeuchi



 
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