Title:
エキシマランプ
Document Type and Number:
Japanese Patent JP7115036
Kind Code:
B2
Abstract:
An issue and a purpose of the present invention is to provide an excimer lamp capable of using aluminum as a material constituting an external electrode and avoiding damage of the external electrode. [Solution means] An excimer lamp has a discharge vessel composed of a material that transmits ultraviolet rays, and equipped with an external electrode outside the discharge vessel, wherein the external electrode is composed of a plurality of conductive wires formed by a pattern in such a way that the input per unit volume of the external electrode becomes a size within a set range, and is made of a material including aluminum as a main component.
Inventors:
Hideaki Yagyu
Application Number:
JP2018100264A
Publication Date:
August 09, 2022
Filing Date:
May 25, 2018
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01J65/00
Domestic Patent References:
| JP2013140912A | ||||
| JP2016195019A | ||||
| JP2001023577A | ||||
| JP2008218403A | ||||
| JP8124535A | ||||
| JP7078592A |
Foreign References:
| US20020089275 |
Attorney, Agent or Firm:
Nobuo Fujimoto
Masahiko Oi
Masuo Yamada
Keisuke Shigenobu
Masahiko Oi
Masuo Yamada
Keisuke Shigenobu