Exposure equipment and manufacturing method of articles

Title:

Exposure equipment and manufacturing method of articles

Document Type and Number:

Japanese Patent JP6338377

Kind Code:

B2

Inventors:

Hiromi Kaname
Yoshio Susaki

Application Number:

JP2014001952A

Publication Date:

June 06, 2018

Filing Date:

January 08, 2014

Export Citation:

Assignee:

Canon Inc

International Classes:

G03F9/02; G03F7/20

Domestic Patent References:

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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