Title:
An exposure device and a device manufacturing method
Document Type and Number:
Japanese Patent JP5936328
Kind Code:
B2
Inventors:
Kentaro Ushiku
Kenichi Imanishi
Suzuki Kenji
Sano Yuki
Kenichi Imanishi
Suzuki Kenji
Sano Yuki
Application Number:
JP2011231891A
Publication Date:
June 22, 2016
Filing Date:
October 21, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/683
Domestic Patent References:
| JP6188167A | ||||
| JP2003059802A | ||||
| JP2003115451A | ||||
| JP2003303755A | ||||
| JP2006156507A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa