Title:
光源装置及びこれを備えた露光装置
Document Type and Number:
Japanese Patent JP6623847
Kind Code:
B2
Abstract:
Light source apparatus includes a light source, a LED element contains the first shot wavelength of light, the first light radiation area, and contains a plurality of LED elements with the first shot second wavelength wavelength light, second light emitting region; light detection, detection of the first wavelength of light strength; and a control section constituted for light radiation for the first region and the second light emitting region independently connected, power off control. A control unit includes a storage unit, the storage unit stores a first wavelength of light light is the first target target total cumulative quantity of information, the cumulative reach in a light quantity detected by the detection of light of the first wavelength of light intensity based on the calculated cumulative amount of light first target, and for the second light emitting region the electric control independently the control power on the first light emission region stop.
Inventors:
Takeo Matsushima
Motonori Tada
Rieaki Uehara
Junichi Kinoshita
Motonori Tada
Rieaki Uehara
Junichi Kinoshita
Application Number:
JP2016043666A
Publication Date:
December 25, 2019
Filing Date:
March 07, 2016
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP3006011A | ||||
| JP2004327823A | ||||
| JP2007033882A | ||||
| JP2004207343A | ||||
| JP2004335949A | ||||
| JP2013069860A | ||||
| JP2016224321A |
Foreign References:
| WO2015015749A1 | ||||
| US20090040523 | ||||
| US20140340665 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office