Title:
An exposure device provided with the optical element supporting structure used for an adhesion method and this method of an optical element to the optical element supporting structure, and this optical element
Document Type and Number:
Japanese Patent JP5938707
Kind Code:
B2
Inventors:
Koji Watanabe
Ishiba Yukio
Ishiba Yukio
Application Number:
JP2011211887A
Publication Date:
June 22, 2016
Filing Date:
September 28, 2011
Export Citation:
Assignee:
Hakuto Co., Ltd.
International Classes:
G03F7/20; C09J5/00; G02B19/00
Domestic Patent References:
| JP63023111A | ||||
| JP63057605U | ||||
| JP63064945A | ||||
| JP4143929A | ||||
| JP4166904A | ||||
| JP2000155251A | ||||
| JP2008040086A |
Foreign References:
| WO2003040785A1 |
Attorney, Agent or Firm:
Cleo International Law & Patent Office