Title:
An exposure device provided with an optical distribution apparatus, a lighting system, and this
Document Type and Number:
Japanese Patent JP6051905
Kind Code:
B2
Inventors:
Takeshi Negishi
Application Number:
JP2013021826A
Publication Date:
December 27, 2016
Filing Date:
February 06, 2013
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B6/26; G03F7/20; H01L21/027
Domestic Patent References:
| JP5326370A | ||||
| JP10189428A | ||||
| JP11194228A | ||||
| JP6138341A | ||||
| JP5040215A | ||||
| JP2006171426A | ||||
| JP2004070310A | ||||
| JP2001330964A | ||||
| JP2011134932A | ||||
| JP2006523944A | ||||
| JP2010507112A | ||||
| JP4618446B2 |
Attorney, Agent or Firm:
Hiroaki Sakai
Previous Patent: A primary radiation machine for antenna systems, and an antenna system
Next Patent: JPS6051906
Next Patent: JPS6051906