Title:
ファンユニットおよびこれを使用したファンフィルタユニット
Document Type and Number:
Japanese Patent JP6464549
Kind Code:
B2
More Like This:
| JP2007514096 | Vacuum pump device |
Inventors:
Enomoto
Application Number:
JP2013177953A
Publication Date:
February 06, 2019
Filing Date:
August 29, 2013
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
F04D23/00; F04D29/70; F24F7/06
Domestic Patent References:
| JP2002106493A | ||||
| JP6010896A | ||||
| JP2009210180A |
Foreign References:
| US20130028759 |
Attorney, Agent or Firm:
Ichi Hirose
Hide Tanaka Tetsu
Hide Tanaka Tetsu