Title:
A feed unit of organic metallic compound content gas
Document Type and Number:
Japanese Patent JP6237882
Kind Code:
B2
Abstract:
[Problem] To provide an organic metal compound supply device that can stably supply an organic metal compound-containing gas stably over a long period of time. [Solution] This supply device (1) of an organic metal compound-containing gas is provided with a container (10), a supply unit (13), and a high-specific gravity object. The container (10) comprises an inner space (10a), a carrier gas inlet (10b) and an exhaust port (10c). The inlet (10b) is connected to the bottom of the inner space (10a). The exhaust port (10c) is connected to the top of the inner space (10a). The supply unit (13) is positioned in the inner space (10a). A mixture of organic metal compound-containing particles and a filler material is arranged in the supply unit (13). The high-specific gravity object is arranged in the inner space (10a), above the supply unit (13). The high-specific gravity object has a specific gravity higher than that of the organic metal compound-containing particles.
Inventors:
Masashi Shirai
Chihiro Hasegawa
Koji Takebayashi
Jin Yoshitomi
Chihiro Hasegawa
Koji Takebayashi
Jin Yoshitomi
Application Number:
JP2016509916A
Publication Date:
November 29, 2017
Filing Date:
December 25, 2014
Export Citation:
Assignee:
Ube Industries,Ltd.
International Classes:
C23C16/448; B01J7/00; H01L21/205
Domestic Patent References:
| JP3014166U | ||||
| JP2007314878A | ||||
| JP8250440A | ||||
| JP2004140328A |
Attorney, Agent or Firm:
Kazutoshi Nakayama