METHOD AND DEVICE FOR ADJUSTING FEEDBACK GAIN OF TRACKING TYPE LASER INTERFEROMETER

Japanese Patent JP2018025483

A

PROBLEM TO BE SOLVED: To provide a method and a device for automatically adjusting a gain suitable for an optical axis tracking control system without using the absolute distance between a retroreflector and a laser interferometer.SOLUTION: A tracking type laser interferometer includes: a laser interferometer 101; an optical axis deviation amount sensor 102 for detecting the deviation of an optical axis of the laser interferometer 101; a biaxial rotation mechanism 104 for orienting the laser interferometer 101 toward an arbitrary direction; an angle sensor 105 for detecting a rotation angle of the biaxial rotation mechanism 104; a retroreflector 107 for reflecting reflectance in a direction parallel to incident light; and a controller 108 for feedback-controlling the biaxial rotation mechanism 104 so as to track a retroreflector reflector 107 based on signals of the optical axis deviation amount sensor 102 and the angle sensor 105. When light returning from the reflection reflector 107 is within a detection range of the optical axis deviation amount sensor 102, the tracking control starts, and a gain of the feedback control is changed according to the behavior of a position of light returned on the optical axis deviation amount sensor 102 by the tracking control.SELECTED DRAWING: Figure 1

HARA SHINICHI

JP2016157922A

February 15, 2018

August 10, 2016

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MITUTOYO CORP

G01B9/02; G01S17/32; G01S17/66

JP2012112919A	2012-06-14
JP2009002728A	2009-01-08
JP2009229066A	2009-10-08

US20100176270A1

2010-07-15

Satoshi Takaya
Keisuke Matsuyama
Tsuyoshi Makino
Takashi Fujita
Shuzo Sudo

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