Title:
A film deposition system provided with a heating roller and it
Document Type and Number:
Japanese Patent JP6252402
Kind Code:
B2
Inventors:
Eisaburo Kanda
Hiroto Watanabe
Hiroto Watanabe
Application Number:
JP2014166264A
Publication Date:
December 27, 2017
Filing Date:
August 18, 2014
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C23C14/56; B65H27/00; C23C14/34; C23C16/46; F16C13/00
Domestic Patent References:
| JP2013124413A | ||||
| JP2001297867A | ||||
| JP11236669A | ||||
| JP9157835A | ||||
| JP5311440A | ||||
| JP2000320968A | ||||
| JP2010007142A | ||||
| JP6215372A | ||||
| JP2004245880A | ||||
| JP2005201393A | ||||
| JP2004118120A |
Foreign References:
| US5283621 |
Attorney, Agent or Firm:
Noriyuki Tsujikawa
Masao Yamamoto
Masao Yamamoto