Title:
FILM THICKNESS CONTROL METHOD FOR MULTILAYER OPTICAL FILM, MANUFACTURING METHOD FOR MULTILAYER OPTICAL FILM, AND SPUTTERING DEVICE FOR MULTILAYER OPTICAL FILM
Document Type and Number:
Japanese Patent JP2016125108
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a film thickness control method, a manufacturing method for a multilayer optical film, and a sputtering device such that when a multilayer optical film is formed, film thicknesses of respective optical films can be adjusted.SOLUTION: Provided are a film thickness control method and a sputtering device for a multilayer optical film, where the method comprises: preparing a regression equation which represents relation between a film thickness of an optical film and an optical characteristic value of the multilayer optical film obtained by regressive analysis of a theoretical optical characteristic value group of the multilayer optical film to which a combination of respective film thicknesses of optical films is allocated; preparing a model equation which represents relation between variation amounts of manufacture parameters used to form the optical film as to a film deposition device and a variation amount of film thicknesses of the optical film; measuring an optical characteristic value of an actually formed multilayer optical film and thus finding a measured value thereof; calculating an estimated film thickness deviation amount from each reference film thickness of the optical film by applying the measured value to the regression equation; applying the estimated film thickness deviation amount to the model equation and then calculating an adjustment amounts for the manufacture parameters needed to put a film deviation amount of each optical film closer to 0 respectively; and changing the manufacture parameters based upon the adjustment amount.SELECTED DRAWING: Figure 3
Inventors:
SHUDO SHUNSUKE
SAGI AKIRA
HAYASHI TAKATOSHI
TAKAMURA RYUICHI
TOKUCHI NAOKI
SAGI AKIRA
HAYASHI TAKATOSHI
TAKAMURA RYUICHI
TOKUCHI NAOKI
Application Number:
JP2015001404A
Publication Date:
July 11, 2016
Filing Date:
January 07, 2015
Export Citation:
Assignee:
NITTO DENKO CORP
International Classes:
C23C14/34; C23C16/52; G02B5/28
Domestic Patent References:
| JP2001181850A | 2001-07-03 | |||
| JP2006071402A | 2006-03-16 | |||
| JPH11316187A | 1999-11-16 | |||
| JP2003099992A | 2003-04-04 | |||
| JP2006091694A | 2006-04-06 |
Attorney, Agent or Firm:
Takayoshi Kusumoto
Takanobu Nakaetsu
Satoshi Mikumo
Takanobu Nakaetsu
Satoshi Mikumo