Title:
クリーンルームのフィルタ設置部
Document Type and Number:
Japanese Patent JP3995283
Kind Code:
B2
Inventors:
Kaoru Toyota
Toshio Kobayashi
Morii Tsuneyuki
Fujiwara Goro
Shinji Hattori
Naoki Irie
Toshio Kobayashi
Morii Tsuneyuki
Fujiwara Goro
Shinji Hattori
Naoki Irie
Application Number:
JP3642196A
Publication Date:
October 24, 2007
Filing Date:
February 23, 1996
Export Citation:
Assignee:
Dan Takuma Co., Ltd.
International Classes:
B01L1/04; F24F7/06; B01D39/00; B01D46/00
Domestic Patent References:
| JP8024564A | ||||
| JP6198123A | ||||
| JP2026612A | ||||
| JP51010346U |
Attorney, Agent or Firm:
Shuichiro Kitamura