Title:
硬脆性基板の平坦化加工方法
Document Type and Number:
Japanese Patent JP6538375
Kind Code:
B2
Inventors:
Eiichi Yamamoto
Mochimaru retrograde
Toshihiro Ito
Yutaka Yoshida
Akatsuki Ito
Mochimaru retrograde
Toshihiro Ito
Yutaka Yoshida
Akatsuki Ito
Application Number:
JP2015044338A
Publication Date:
July 03, 2019
Filing Date:
March 06, 2015
Export Citation:
Assignee:
Okamoto Machine Tool Co., Ltd.
International Classes:
B24B41/06; B23Q3/08; B24B7/04; B24B9/00; H01L21/304
Domestic Patent References:
| JP10015795A | ||||
| JP2014058444A | ||||
| JP10180599A | ||||
| JP2008114326A |
Attorney, Agent or Firm:
Masahisa Otake