Title:
流量センサ素子
Document Type and Number:
Japanese Patent JP7426170
Kind Code:
B2
Abstract:
An object is to provide a flow sensor element is non-directional and has an excellent sensor sensitivity. A flow sensor element includes a base body having a spherical shape, and a temperature-sensitive film pattern that is disposed over the entirety of a surface of the base body, and changes in an electrical resistance value due to a change in temperature. It is preferable that the temperature-sensitive film pattern be formed by trimming a temperature-sensitive film that has been formed on the surface of the base body. In the flow sensor element, the temperature-sensitive film pattern can be disposed over the entirety of the surface of the base body having a spherical shape. This enables a constant sensor sensitivity to be obtained regardless of a direction of a fluid, and the accuracy of detection of a flow rate can be improved.
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| JPH08110256 | THERMAL FLOW RATE-MEASURING APPARATUS |
| JPS5917371 | [Title of the Invention] Flow detecting device |
| WO/1995/023338 | SENSOR ARRANGEMENT FOR A HOT-FILM ANEMOMETER |
Inventors:
Masahiro Shimodaira
Katsuya Miura
Katsuya Miura
Application Number:
JP2020113910A
Publication Date:
February 01, 2024
Filing Date:
July 01, 2020
Export Citation:
Assignee:
koa corporation
International Classes:
G01P5/12
Domestic Patent References:
| JP63210666A | ||||
| JP61133866A | ||||
| JP10281839A |
Foreign References:
| US20180045751 | ||||
| US20120137765 |
Attorney, Agent or Firm:
Infot Patent Attorney Corporation
Hiroyoshi Aoki
Masayuki Amada
Miwa Masayoshi
Hiroyoshi Aoki
Masayuki Amada
Miwa Masayoshi