Title:
SENSOR HOLDING TOOL AND FLUID CONTROLLER INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2017180610
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sensor holding tool capable of being easily and surely attached to a gas line even in a case of specification change and the like, and a fluid controller including the sensor holding tool.SOLUTION: A sensor holding tool 1 is configured to be mounted to a pair of hexagon socket head cap screws 18 for fixing a flow rate control instrument 10 to a joint 24. The sensor holding tool 1 includes: a base block 2 arranged on the pair of screws 18; a pair of hexagon pins 3 and a pair of screw 4 supporting the base block 2, inserted and fixed to a hexagon hole 18c of the pair of screws 18, and configured to fix the base block 2 to the screw 18; and a fixation screw 5 and a holding plate 6 fixed to the base block 2, and holding a thermocouple 16.SELECTED DRAWING: Figure 5
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Inventors:
NAKAGAWA HAJIME
SHINOHARA TSUTOMU
MATSUDA TAKAHIRO
SHINOHARA TSUTOMU
MATSUDA TAKAHIRO
Application Number:
JP2016066715A
Publication Date:
October 05, 2017
Filing Date:
March 29, 2016
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16K27/00
Attorney, Agent or Firm:
Wilfort International Patent Office