Title:
含フッ素環状化合物、含フッ素高分子化合物、それを用いたレジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4079893
Kind Code:
B2
Abstract:
The present invention relates to a fluorine-containing cyclic compound of formula (5): wherein R2-R4 and R9-R15 are independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, or nitrogen atom. R10 and R11, R12 and R13, or R14 and R15 may be bonded together to form a ring. In such a case, it is a C1-C25 alkylene group that may contain a hetero atom such as oxygen, sulfur and nitrogen, “a” is 0 or 1, “b” is an integer of 0-2 and “c” is an integer of 0-2.
Inventors:
Haruhiko Komoriya
Shinichi Tsunoda
Mitsutaka Otani
Takeo Furumata
Kazuhiko Maeda
Shinichi Tsunoda
Mitsutaka Otani
Takeo Furumata
Kazuhiko Maeda
Application Number:
JP2004044142A
Publication Date:
April 23, 2008
Filing Date:
February 20, 2004
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07C33/05; G03F7/039; C07C31/44; C07C33/44; C07C49/323; C07C49/337; C07C49/345; C07C49/573; C07C69/003; C07C69/653; C08F14/18; C08F16/26; C08F20/22; C08F32/04; H01L21/027
Foreign References:
| US20050124827 | ||||
| US20050124828 | ||||
| US3627847 |
Other References:
Klaus Burger, et.al.,Synthesis of 4,4-bis(trifluoromethyl)-1-oxabuta-1,3-dienes,Journal fuer Praktische Chemie/Chemiker-Zeitung,ドイツ,Johann Ambrosius Barth,1992年,Vol.334,p.219-226
Yoshimitsu Suda, et.al.,Highly diastereoselective alcoholysis of σ-symmetric dicarboxylic acid anhydrides using 1-phenyl-3,3-bis(trifluoromethyl)propane-1,3-diol,Chemistry Letters ,日本化学会,1992年,1992, No.3,p.389-392
Yoshimitsu Suda, et.al.,Highly diastereoselective alcoholysis of σ-symmetric dicarboxylic acid anhydrides using 1-phenyl-3,3-bis(trifluoromethyl)propane-1,3-diol,Chemistry Letters ,日本化学会,1992年,1992, No.3,p.389-392
Attorney, Agent or Firm:
Yoshiaki Hanada