Title:
SHAPE MEASUREMENT APPARATUS AND SHAPE MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2017067531
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide technique capable of precisely measuring the shape of an object.SOLUTION: A control part makes a first change part control a movement of a first member included in a light emission part, and then while an angle of emission of emission light, emitted from a light source part, from a light emission part to a surface of an object to be measured is changed, the surface of the object to be measured is scanned with the emission light. At this time, the control part makes a second change part control a movement of a second member included in a light reception part, and then an angle of incidence of reflected light, generated according to irradiation of the surface of the object to be measured with the emission light, on the light reception part is changed, a state in which a light reception region, receiving the reflected light, at the light reception part is aligned with a reference region is maintained at the light reception part on the basis of an electric signal output from a photoelectric conversion part according to a quantity of deviation of the light reception region receiving the reflected light from the reference region. Then the shape of the object to be measured is calculated on the basis of quantities of movements of the first and second members from reference positions at each of a plurality of timings.SELECTED DRAWING: Figure 1
Inventors:
OGAWA HIDEAKI
Application Number:
JP2015191164A
Publication Date:
April 06, 2017
Filing Date:
September 29, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
G01B11/24
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita