Title:
芳香族炭化水素樹脂、リソグラフィー用下層膜形成組成物及び多層レジストパターンの形成方法
Document Type and Number:
Japanese Patent JPWO2012090408
Kind Code:
A
Inventors:
Takeshi Higashihara
Naoya Uchiyama
Masatoshi Echigo
Naoya Uchiyama
Masatoshi Echigo
Application Number:
JP2011006979W
Publication Date:
June 05, 2014
Filing Date:
December 14, 2011
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Inc.
International Classes:
C08G14/04; G03F7/11; G03F7/26; H01L21/027
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