Title:
化学吸着膜の形成方法、及び化学吸着膜
Document Type and Number:
Japanese Patent JP4654627
Kind Code:
B2
Abstract:
The process for forming a chemical adsorption film of the present invention includes a hydrophilic treatment step ST1 of making the surface of the material hydrophilic, a treatment step ST2 of adhering an acid or a base onto the surface of the base material which is made hydrophilic, and a film forming step ST3 of contacting the surface of the base material on which an acid or a base is adhered with a chemical adsorbent to form a chemical adsorption film on the surface.
Inventors:
Naoyuki Toyota
Application Number:
JP2004217069A
Publication Date:
March 23, 2011
Filing Date:
July 26, 2004
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
C03C17/28; B01J19/00; C04B41/46; C23C16/02; C23C26/00
Domestic Patent References:
| JP2000508542A | ||||
| JP6047755A |
Attorney, Agent or Firm:
Kazuya Nishi
Masatake Shiga
Kazunori Onami
Masatake Shiga
Kazunori Onami