PURPOSE: To prevent the breakdown of an airtight window by covering the window and the plasma generating part side surface of an excitation line with a corrosion resistant thin film of oxide or nitride.
CONSTITUTION: A coaxial outer tube 3 and a coaxial inner tube 4 of oxgen free copper are installed in a hole of a reaction chamber wall 2. An excitation antenna 5 is installed on the tip of the inner tube 4. A porcelain window 6 supports and keeps the inner tube in an airtight condition. Ag is metalized on the outer periphery 62 and the inner periphery 61, and the outer tube 3 and the inner tube 4 are brazed by means of an eutectic crystal Ag brazing filler metal of Ag and Cu. Microwave electric power is excited by means of a coaxial line. A Cr2O3 thin film 7 is formed densely in a window 6 and on the inner peripheral surface of the outer tube 3 and on the outer peripheral surface of the inner tube 4. In this constitution, corrosion proof treatment can be applied to the window without exerting influence on a manufacturing process.
SAKAMOTO YUICHI
JPH02220433A | 1990-09-03 | |||
JPS6456873A | 1989-03-03 |