Title:
The fracture method of a glue film
Document Type and Number:
Japanese Patent JP5943727
Kind Code:
B2
Inventors:
Ryoko Fujitani
Minoru Matsuzawa
Minoru Matsuzawa
Application Number:
JP2012132751A
Publication Date:
July 05, 2016
Filing Date:
June 12, 2012
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; H01L21/683
Domestic Patent References:
| JP2001102329A | ||||
| JP2009277837A | ||||
| JP2006049591A |
Foreign References:
| US20050101109 |
Attorney, Agent or Firm:
Akira Matsumoto
Hiroshi Oue
Hiroshi Oue
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