Title:
A frequency-analysis device and the frequency-analysis method
Document Type and Number:
Japanese Patent JP6283501
Kind Code:
B2
Abstract:
A semiconductor device testing apparatus 1A includes a tester unit 16 that generates an operational pulse signal, an optical sensor 10 that outputs a detection signal as a response to the operational pulse signal, a pulse generator 17 that generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzer 13 that receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzer 14 that receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unit 18 that acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzer 13 and the phase of the reference signal acquired by the spectrum analyzer 14.
Inventors:
Nakamura common rule
Akihiro Otaka
Mitsutetsu Nishizawa
Akihiro Otaka
Mitsutetsu Nishizawa
Application Number:
JP2013233776A
Publication Date:
February 21, 2018
Filing Date:
November 12, 2013
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01R31/26; G01R23/16
Domestic Patent References:
| JP2010271307A | ||||
| JP2002247119A | ||||
| JP63048904A | ||||
| JP2013057687A | ||||
| JP62180274A | ||||
| JP2136765A | ||||
| JP1113676A | ||||
| JP2004167316A | ||||
| JP2011085691A | ||||
| JP8211131A | ||||
| JP2004151065A | ||||
| JP2007064975A |
Foreign References:
| US20070046301 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Satoru Ishida
Kenichi Shibayama
Yoshiki Kuroki
Satoru Ishida
Kenichi Shibayama