Title:
GAS SENSOR
Document Type and Number:
Japanese Patent JP2023138380
Kind Code:
A
Abstract:
To provide a gas sensor that can suppress characteristic fluctuations due to deformation of a semiconductor substrate.SOLUTION: A gas sensor (1) includes a substrate (rewiring layer 30), a light emitting element (11) provided on one surface of a substrate (30a) or embedded in the substrate, a light receiving element (12) that is provided on the surface of the substrate or embedded in the substrate and receives light emitted from the light emitting element, and a plurality of external connection terminals (40), at least some of which are electrically connected to the light emitting element and the light receiving element, provided on the back surface (30b), which is the surface opposite to the front surface of the substrate, and the plurality of external connection terminals are arranged such that no light emitting element or light receiving element is present on a line connecting any two external connection terminals in plan view.SELECTED DRAWING: Figure 1
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Inventors:
FUKUNAKA TOSHIAKI
FURUYA TAKAAKI
FURUYA TAKAAKI
Application Number:
JP2023031414A
Publication Date:
October 02, 2023
Filing Date:
March 01, 2023
Export Citation:
Assignee:
ASAHI KASEI DENSHI KK
International Classes:
H01L31/12
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Kengo Yoshida
Toshiki Suzuki
Mitsutsugu Sugimura
Kengo Yoshida
Toshiki Suzuki
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