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Title:
A grinding device and a grinding method
Document Type and Number:
Japanese Patent JP6157229
Kind Code:
B2
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Inventors:
Takahiko Tsuno
Application Number:
JP2013122022A
Publication Date:
July 05, 2017
Filing Date:
June 10, 2013
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B24B7/00; B24B47/22; B24B49/04; H01L21/304
Domestic Patent References:
JP2008238341A
JP2000354962A
JP7130692A
Foreign References:
US5816895
Attorney, Agent or Firm:
Akira Matsumoto



 
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