Title:
A grinding method of abrasive soap, an abrasive soap set, and a base
Document Type and Number:
Japanese Patent JP6256482
Kind Code:
B2
Abstract:
A polishing agent comprises: a fluid medium; an abrasive grain containing a hydroxide of a tetravalent metal element; a first additive; a second additive; and a third additive, wherein: the first additive is at least one selected from the group consisting of a compound having a polyoxyalkylene chain and a vinyl alcohol polymer; the second additive is a cationic polymer; and the third additive is an amino group-containing sulfonic acid compound.
Inventors:
Kuki Minami
Tomohiro Iwano
Toshiaki Akutsu
Tomohiro Iwano
Toshiaki Akutsu
Application Number:
JP2015554602A
Publication Date:
January 10, 2018
Filing Date:
September 10, 2014
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP201284906A | ||||
| JP2013138153A | ||||
| JP2001294848A | ||||
| JP2010141288A | ||||
| JP200891411A |
Foreign References:
| WO2009131133A1 | ||||
| WO2013125441A1 | ||||
| WO2013125446A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Tomoya Furoshita
Yoshinori Shimizu
Hiroyuki Hirano
Tomoya Furoshita
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