Title:
超音波振動用砥石,これを備える超音波振動加工装置および超音波振動用砥石の製造方法
Document Type and Number:
Japanese Patent JP4636905
Kind Code:
B2
Inventors:
Kazuma Sekiya
Fumiteru Tashino
Fumiteru Tashino
Application Number:
JP2005068006A
Publication Date:
February 23, 2011
Filing Date:
March 10, 2005
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24D3/34; B24B1/04; B24B41/04; B24D3/14; H01L21/301
Domestic Patent References:
| JP9300222A | ||||
| JP10076468A | ||||
| JP5200659A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara