Title:
A hair drier for a semiconductor device test
Document Type and Number:
Japanese Patent JP6126267
Kind Code:
B2
Abstract:
The present invention relates to a handler for testing a semiconductor element used in testing a manufactured semiconductor element. The handler for testing a semiconductor element according to the present invention is provided with a test chamber between a first chamber and a second chamber on the circulation path of a test tray, wherein the first chamber may function as a soak chamber or a de-soak chamber, and the second chamber functions as a de-soak chamber or functions as a soak chamber while switching functions together with the function change of the first chamber. In addition, the test tray is also cycled by selecting one of the two different circulation paths. Therefore, even when the test temperature conditions fluctuate significantly, the standby time of the handler is significantly shortened, thereby improving the utilization rate and processing capacity of the handler.
Inventors:
Na, Yunson
No, Junki
No, Junki
Application Number:
JP2016078002A
Publication Date:
May 10, 2017
Filing Date:
April 08, 2016
Export Citation:
Assignee:
Tech Wing Incorporated
International Classes:
G01R31/26
Domestic Patent References:
| JP2002164404A | ||||
| JP2007199064A | ||||
| JP2013221945A |
Foreign References:
| WO2008075439A1 |
Attorney, Agent or Firm:
Sakuo Yamaguchi