Title:
光インプリント用硬化性組成物、パターン形成方法およびパターン
Document Type and Number:
Japanese Patent JP5857014
Kind Code:
B2
Abstract:
Provided is a curable composition for photo imprints excellent in the mold releasability and the ink jettability. THe curable composition for photo imprints, comprising: a polymerizable compound (A); a photo-polymerization initiator (B); and a mold releasing agent (C), the mold releasing agent (C) being represented by the formula (I) below. Rf represents a C1-8 fluorine-containing alkyl group having two or more fluorine atoms; m represents 1 or 2; L represents a single bond or divalent linking group; n represents 1 or 2; X represents a single bond, oxygen atom, sulfur atom, or nitrogen atom; R1 represents a C1-8 substituent being free from a polymerizable group; R2 represents a hydrogen atom, C1-8 substituent, or divalent linking group; p represents 1 or 2, q represents 0 or 1, and r represents 1 or 2; R1 and R2 may combine with each other to form a ring.
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Inventors:
Hirotaka Kitagawa
Yuichiro Goto
Yuichiro Enomoto
Yuichiro Goto
Yuichiro Enomoto
Application Number:
JP2013185847A
Publication Date:
February 10, 2016
Filing Date:
September 09, 2013
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
H01L21/027; B29C59/02; C08F2/48
Domestic Patent References:
| JP2012079782A | ||||
| JP2010106062A |
Foreign References:
| WO2011002042A1 |
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes