Title:
硬化性組成物、及びこれを用いるパターン形成方法
Document Type and Number:
Japanese Patent JP5932501
Kind Code:
B2
Abstract:
A curable composition contains a polymerizable compound and a polymerization initiator. The polymerization initiator initiates polymerization to cure the polymerizable compound. The curable composition further contains compounds having the following general formulae (1) and (2): wherein X1 is selected from a hydroxy group, a carboxy group, a sulfo group, an amino group, and an alkoxy group, l1 denotes an integer in the range of 0 to 7, m1 denotes an integer in the range of 1 to 5, and n1 denotes an integer in the range of 1 to 16, and X2 is selected from a hydroxy group, a carboxy group, a sulfo group, an amino group, and an alkoxy group, 12 denotes an integer in the range of 0 to 7, m2 denotes an integer in the range of 1 to 5, and n2 denotes an integer in the range of 1 to 16.
Inventors:
Chieko Mihara
Toshiki Ito
Okinaka Motoki
Toshiki Ito
Okinaka Motoki
Application Number:
JP2012128996A
Publication Date:
June 08, 2016
Filing Date:
June 06, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
C08F2/44; B29C59/02; C08F2/46; C08F20/18; C08G85/00; H01L21/027
Domestic Patent References:
JP2008178984A | ||||
JP2010113170A | ||||
JP2010106185A | ||||
JP2010016149A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa