Title:
A hardening resin constituent, a resin mold for imprints, an optical imprint method, a manufacturing method of an integrated circuit, a manufacturing method of a detailed optical element, and fluorination urethane (meta) acrylate
Document Type and Number:
Japanese Patent JP6230159
Kind Code:
B2
Abstract:
A curable resin composition comprising: a fluorinated urethane(meth)acrylate represented by formula (1), wherein, R1, R2, R3 and R4 each independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer within the range of 1 to 10; R3 and R4 each independently represents the hydrogen atom when x and y are both 1; R3 represents the hydrogen atom and R4 represents the methyl group when x is 1 and y is 2; R3 represents the methyl group and R4 represents the hydrogen atom when x is 2 and y is 1; and R3 and R4 each independently represents the methyl group when x and y are both 2.
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Inventors:
Risa Wada
Takeshi Oyuki
Takeshi Oyuki
Application Number:
JP2014554481A
Publication Date:
November 15, 2017
Filing Date:
December 25, 2013
Export Citation:
Assignee:
Toyo Gosei Co., Ltd.
International Classes:
C08F299/06; B29C59/02; C08F20/36; H01L21/027
Domestic Patent References:
| JP2012518067A | ||||
| JP2012528217A | ||||
| JP2007527784A |
Foreign References:
| WO2010147142A1 |
Attorney, Agent or Firm:
Hiroyuki Kurihara