Title:
マイクロ波加熱処理装置および処理方法
Document Type and Number:
Japanese Patent JP5490087
Kind Code:
B2
Abstract:
Four microwave introduction ports are arranged to deviate from directly above a wafer in such a way that the long sides thereof are in parallel to at least one of the four straight sides. The top surface of a rectifying plate which surrounds the wafer is inclined so as to be widened from the side of the wafer (inner side) toward the side of a sidewall portion (outer side) to form an inclined portion. The inclined portion is disposed to face the four microwave introduction ports in a vertical direction.
Inventors:
Taro Ikeda
Sumi Tanaka
Sumi Tanaka
Application Number:
JP2011289025A
Publication Date:
May 14, 2014
Filing Date:
December 28, 2011
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H05B6/64; F27D11/12; H05B6/72
Domestic Patent References:
| JP11214143A | ||||
| JP10172751A | ||||
| JP2011066254A | ||||
| JP2003187957A | ||||
| JP2008275178A | ||||
| JP2003217818A | ||||
| JP2005268624A |
Attorney, Agent or Firm:
Kazuhiro Watanabe
Katsumi Hoshimiya
Tatsuya Josawa
Katsumi Hoshimiya
Tatsuya Josawa